Upright microscope for large sample examination – automated and clean room compatible Analyze smallest MEMS sensors up to XXL wafer or even entire flat planel panel displays without destroying them. Thanks to the sample height of up to 254 mm and lateral space of up to 300 mm you examine the broadest range of samples with Axio Imager Vario. The column design offers high stability. Take control of your wafer in the clean room – Axio Imager Vario is certified to DIN EN ISO 14644-1 and meets Class 5 requirements. A motorized z-drive in addition with the hardware auto focus ensure the automatic setting of the optimum focus position. - Maximum sample height up to 254 mm - Lateral sample space up to 300 mm x 300 mm - DIN EN ISO 14644-1 certified – meets the requirements of clean room class 5